CMOS Closed-Loop Control of MEMS Varactors for Robust Ka-Band Tunable Filters
A closed-loop capacitance sensing and control mixed-signal CMOS circuit with a dedicated
sensor electrode and a proportional-integral controller was designed to have a sensitivity of …
sensor electrode and a proportional-integral controller was designed to have a sensitivity of …
CMOS Control Circuit for Robust MEMS Varactors
A CMOS closed-loop control circuit was designed, fabricated, and tested for order-of-
magnitude improvement of the robustness of a MEMS varactor against ambient temperature …
magnitude improvement of the robustness of a MEMS varactor against ambient temperature …