R Qiu, O Bäcke,
D Stiens, W Janssen, J Kümmel… - Surface and Coatings …, 2021 - Elsevier
In this work, Ti 1-x Al x N (TiAlN) coatings were synthesized by low pressure chemical
vapour deposition (LPCVD), and the influence of a rotational precursor gas supply on the …