Design and Experimental Research on Flexible Capacitive Tactile Sensor Based on Micro-Electro-Mechanical-System
Q Peng, Q Xianmin, B Yulong, L Yang… - 2021 International …, 2021 - ieeexplore.ieee.org
With the increasing degree of social automation, various type of sensors play important roles
in many fields, such as aerospace, robotics, medicine and biology, etc. Based on this, a …
in many fields, such as aerospace, robotics, medicine and biology, etc. Based on this, a …
[图书][B] Photonic Crystal Directional Coupler Based Optomechanical Sensor
MA Zylstra - 2015 - search.proquest.com
Abstract An extremely small (6.5× 6.5 µm) optomechanical sensor is proposed that utilizes a
photonic crystal (PC) etched onto silicon-on-insulator (SOI) using adapted complimentary …
photonic crystal (PC) etched onto silicon-on-insulator (SOI) using adapted complimentary …
A capacitive flexible tactile sensor
D Yuan, H Shu, Y Bao, B Xu, H Wang - Human Centered Computing: 6th …, 2021 - Springer
In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of
objects based on MEMS technology. This sensor is a structure of a 4× 4 array, with metal Ag …
objects based on MEMS technology. This sensor is a structure of a 4× 4 array, with metal Ag …
[引用][C] CMOS MEMS CAPACITIVE PRESSURE SENSOR FOR LEFT VENTRICULAR END DIASTOLIC PRESSURE
C Wu - 2013