Extensive development of micro/nano-electromechanical systems (MEMS/NEMS) has
resulted in technologies that exhibit excellent performance over a wide range of applications …

Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical
resonators, provide an unprecedented platform for investigating a wide range of applications …

This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …

The increasing interest in the Internet of Things (IoT) has led to the rapid development of low-
power sensors and wireless networks. However, there are still several barriers that make a …

This paper demonstrates the monolithic integration of an airflow sensor based on out-of-
plane movable cantilevers with a CMOS integrated circuit providing small footprint and low …

One of the most interesting nonlinear phenomena of mode coupling is internal resonances,
which can promote directed energy transfer from one eigenmode to another, even at small …

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However,
they cannot meet the high-sensitivity requirement of future high-end markets such as ultra …

Since resonant micro/nanoresonators are very delicate devices with very small dimensions,
therefore, any defects and faults caused by the process of manufacturing and laboratory …

میکرو/نانوتشدیدگرها دستگاه‌هایی بسیار ظریف با ابعاد بسیار کوچک هستند. لذا هرگونه عیب و
ایراد ناشی از فرآیند ساخت و اجرای آزمایشگاهی می‌تواند منجر به تغییرات اساسی در رفتارهای …‎

This paper presents a novel model for investigating squeeze film effect on a simple flexural
beam resonator based on modal Galerkin reduced order method, step by step linearization …