Capacitively coupled radio-frequency discharge in alpha-mode as a variable capacitor
A Khomenko, S Macheret - Journal of Physics D: Applied Physics, 2019 - iopscience.iop.org
In many cases, the capacitance of a plasma discharge is determined by the sheath
capacitance, and therefore controlling the sheath thickness can result in a novel plasma …
capacitance, and therefore controlling the sheath thickness can result in a novel plasma …
A global model of the collisional plasma boundary sheath using step model
AT Elgendy - IEEE Transactions on Plasma Science, 2021 - ieeexplore.ieee.org
Capacitively coupled plasmas (CCPs) are widely used for material processing, for example,
for the manufacturing of semiconductors textile and modified surface. The ever-increasing …
for the manufacturing of semiconductors textile and modified surface. The ever-increasing …