From the bottom-up: toward area-selective atomic layer deposition with high selectivity

AJM Mackus, MJM Merkx, WMM Kessels - Chemistry of Materials, 2018 - ACS Publications
Bottom-up nanofabrication by area-selective atomic layer deposition (ALD) is currently
gaining momentum in semiconductor processing, because of the increasing need for …

Self-assembled monolayers of alkanethiols on Au (111): surface structures, defects and dynamics

C Vericat, ME Vela, RC Salvarezza - Physical Chemistry Chemical …, 2005 - pubs.rsc.org
The surface structures, defects and dynamics of self-assembled monolayers (SAMs) on Au
(111) are reviewed. In the case of the well-known c (4× 2) and√ 3×√ 3 R30° surface …

Area-selective atomic layer deposition of TiN using aromatic inhibitor molecules for metal/dielectric selectivity

MJM Merkx, S Vlaanderen, T Faraz… - Chemistry of …, 2020 - ACS Publications
Despite the rapid increase in the number of newly developed processes, area-selective
atomic layer deposition (ALD) of nitrides is largely unexplored. ALD of nitrides at low …

Effect of the phase states of self-assembled monolayers on pentacene growth and thin-film transistor characteristics

HS Lee, DH Kim, JH Cho, M Hwang… - Journal of the …, 2008 - ACS Publications
To investigate the effects of the phase state (ordered or disordered) of self-assembled
monolayers (SAMs) on the growth mode of pentacene films and the performance of organic …

Mechanism of Precursor Blocking by Acetylacetone Inhibitor Molecules during Area-Selective Atomic Layer Deposition of SiO2

MJM Merkx, TE Sandoval, DM Hausmann… - Chemistry of …, 2020 - ACS Publications
Area-selective atomic layer deposition (ALD) is currently attracting significant interest as a
solution to the current challenges in alignment that limit the development of sub-5 nm …

Sequential Regeneration of Self‐Assembled Monolayers for Highly Selective Atomic Layer Deposition

FSM Hashemi, SF Bent - Advanced Materials Interfaces, 2016 - Wiley Online Library
Next generation 3D electronic devices will require novel processing methods. Area selective
atomic layer deposition (ALD) of robust films has the opportunity to play an important role in …

Thermal stability of thiol and silane monolayers: A comparative study

A Chandekar, SK Sengupta, JE Whitten - Applied Surface Science, 2010 - Elsevier
The stability of self-assembled monolayers (SAMs) at elevated temperatures is of
considerable technological importance. The thermal stability of 1-octadecanethiol (ODT), 16 …

Mixed monolayers of spiropyrans maximize tunneling conductance switching by photoisomerization at the molecule–electrode interface in EGaIn junctions

S Kumar, JT van Herpt, RYN Gengler… - Journal of the …, 2016 - ACS Publications
This paper describes the photoinduced switching of conductance in tunneling junctions
comprising self-assembled monolayers of a spiropyran moiety using eutectic Ga–In top …

Patterning of self-assembled monolayers of amphiphilic multisegment ligands on nanoparticles and design parameters for protein interactions

SE Hoff, D Di Silvio, RF Ziolo, SE Moya, H Heinz - ACS nano, 2022 - ACS Publications
Functionalization of nanoparticles with specific ligands is helpful to control specific
diagnostic and therapeutic responses such as protein adsorption, cell targeting, and …

Characterizing self-assembled monolayer breakdown in area-selective atomic layer deposition

TL Liu, L Zeng, KL Nardi, DM Hausmann, SF Bent - Langmuir, 2021 - ACS Publications
To enable area-selective atomic layer deposition (AS-ALD), self-assembled monolayers
(SAMs) have been used as the surface inhibitor to block a variety of ALD processes. The …