A review on morphotropic phase boundary in fluorite-structure hafnia towards DRAM technology

M Jung, V Gaddam, S Jeon - Nano Convergence, 2022 - Springer
In the present hyper-scaling era, memory technology is advancing owing to the demand for
high-performance computing and storage devices. As a result, continuous work on …

Novel Approach to High κ (∼59) and Low EOT (∼3.8 Å) near the Morphotrophic Phase Boundary with AFE/FE (ZrO2/HZO) Bilayer Heterostructures and High …

V Gaddam, G Kim, T Kim, M Jung, C Kim… - ACS Applied Materials …, 2022 - ACS Publications
We present herewith a novel approach of equally thick AFE/FE (ZrO2/HZO) bilayer stack
heterostructure films for achieving an equivalent oxide thickness (EOT) of 4.1 Å with a …

[HTML][HTML] A flexible Hf0. 5Zr0. 5O2 thin film with highly robust ferroelectricity

X Zhou, H Sun, J Li, X Du, H Wang, Z Luo, Z Wang… - Journal of …, 2024 - Elsevier
Flexible hafnia-based ferroelectric memories are arousing much interest with the ever-
growing demands for nonvolatile data storage in wearable electronic devices. Here, high …

Demonstration of Robust Breakdown Reliability and Enhanced Endurance in Gallium Doped HfO2 Ferroelectric Thin Films

T Huang, YC Li, CF Chen, XX Li, ZY Gu… - IEEE Electron …, 2023 - ieeexplore.ieee.org
In this letter, gallium doped HfO2 (Ga: HfO ferroelectric capacitors were fabricated and
characterized. It is demonstrated that the W/Ga: HfO2/W capacitors under 650° C rapid …

HfO₂-based ferroelectric optoelectronic memcapacitors

N Liu, J Zhou, Y Yao, S Zheng, W Feng… - IEEE Electron …, 2023 - ieeexplore.ieee.org
We report one-capacitor (1C) architecture HfO2-based ferroelectric optoelectronic
memcapacitors (FOMs), empowering with photoelectric perception and memory functions …

ION Enhancement of Ge0.98Si0.02 Nanowire nFETs by High-κ Dielectrics

YR Chen, Z Zhao, CT Tu, YC Liu… - IEEE Electron …, 2022 - ieeexplore.ieee.org
The HfxZryO2 with high Zr content is demonstrated to form the anti-ferroelectric tetragonal
phase (AFE t-phase). The peak dielectric constant (47) of Hf0. 2Zr0. 8O2 is achieved. By …

High-κ Hf0. 3Zr0. 7O2 film with morphotropic phase boundary for DRAM capacitor by controlling H2O dose

XZ Du, Z Luo, SC Shen, WP Bai, H Gan, YW Yin… - Applied Surface …, 2023 - Elsevier
For the miniaturization of dynamic random-access memory (DRAM), it is necessary to obtain
low equivalent oxide thickness (EOT) and low leakage capacitor materials with …

Structural characteristics and polarization switching behaviors in HfO2-ZrO2 ferroelectric nanolaminates

Z Yang, B Zeng, C Ju, J Liao, S Zheng, M Liao… - Journal of Alloys and …, 2024 - Elsevier
Abstract Hf 0.5 Zr 0.5 O 2 solid solution ferroelectric thin film is an extremely promising
candidate for ferroelectric memories due to the high compatibility with silicon-based …

Oxygen Vacancy Modulation with TiO2 Stack Interface Engineering for Ferroelectric Hf0.5Zr0.5O2 Thin Films

X Wang, M Wu, B Cui, Y Li, Y Wu, Y Wen… - IEEE Electron …, 2023 - ieeexplore.ieee.org
Since the discovery of ferroelectric switching in hafnium-based thin films, this family of
materials has garnered significant attention. However, their higher coercive field not only …

Tuning the ferroelectricity of Hf0.5Zr0.5O2 with alloy electrodes

K Liu, B Dang, Z Yang, T Zhang, Z Yang, J Bai… - Science China …, 2024 - Springer
Abstract Tuning ferroelectricity of Hf0. 5Zr0. 5O2 is crucial for facilitating its practical
applications in various fields, including in-memory and neuromorphic computing. Previous …