Focused electron beam induced deposition meets materials science

M Huth, F Porrati, OV Dobrovolskiy - Microelectronic Engineering, 2018 - Elsevier
Focused electron beam induced deposition (FEBID) is a direct-write method for the
fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam …

Focused electron beam-based 3D nanoprinting for scanning probe microscopy: a review

H Plank, R Winkler, CH Schwalb, J Hütner, JD Fowlkes… - Micromachines, 2019 - mdpi.com
Scanning probe microscopy (SPM) has become an essential surface characterization
technique in research and development. By concept, SPM performance crucially depends …

Roadmap for focused ion beam technologies

K Höflich, G Hobler, FI Allen, T Wirtz, G Rius… - Applied Physics …, 2023 - pubs.aip.org
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …

Direct-write 3D nanoprinting of plasmonic structures

R Winkler, FP Schmidt, U Haselmann… - … applied materials & …, 2017 - ACS Publications
During the past decade, significant progress has been made in the field of resonant optics
ranging from fundamental aspects to concrete applications. While several techniques have …

3D nanoprinting via focused electron beams

R Winkler, JD Fowlkes, PD Rack, H Plank - Journal of Applied Physics, 2019 - pubs.aip.org
Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant
topic but still a highly challenging task. Among the pool of nanofabrication techniques …

Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

JD Fowlkes, R Winkler, BB Lewis, MG Stanford… - ACS …, 2016 - ACS Publications
Focused electron beam induced deposition (FEBID) is one of the few techniques that
enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of …

Direct-write of free-form building blocks for artificial magnetic 3D lattices

L Keller, MKI Al Mamoori, J Pieper, C Gspan… - Scientific reports, 2018 - nature.com
By the fabrication of periodically arranged nanomagnetic systems it is possible to engineer
novel physical properties by realizing artificial lattice geometries that are not accessible via …

Mechanical properties of 3D nanostructures obtained by focused electron/ion beam-induced deposition: A review

I Utke, J Michler, R Winkler, H Plank - Micromachines, 2020 - mdpi.com
This article reviews the state-of-the-art of mechanical material properties and measurement
methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas …

Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H2O Reactions

B Geier, C Gspan, R Winkler, R Schmied… - The Journal of …, 2014 - ACS Publications
Focused electron beam induced deposition (FEBID) is an important synthesis method as it is
an extremely flexible tool for fabricating functional (3D) structures with nanometer spatial …

High-fidelity 3D-nanoprinting via focused electron beams: computer-aided design (3BID)

JD Fowlkes, R Winkler, BB Lewis… - ACS Applied Nano …, 2018 - ACS Publications
Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most
promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a …