4,099,854 4,196,396 4.228, 437 4,377,324 4.389, 096 4,392,711 4,403.248 4,441,791
4,445,050 4.459, 182 4,482,213 4,500,171 4,519,676 4,531,126 4,566,935 4,571,603 …

US PATENT DOCUMENTS A display includes an array of light modulators that de? ne a
display plane, a light guide and front-and rear-facing re? ec 4967943 A 1/1978 Pen?' tive …

A method of reducing speckle includes dividing a laser illuminated area into phase cells,
subdividing the phase cells into cell partitions, and applying a temporal phase variation to …

359/224 (57) ABSTRACT (58) Field of Search................................. 359/223-224, A projection
System, a Spatial light modulator, and a method 359/290–292, 295, 298 for forming a …

US6969635B2 - Methods for depositing, releasing and packaging micro-electromechanical
devices on wafer substrates - Google Patents US6969635B2 - Methods for depositing, releasing …

A spatial light modulator includes an upper optically transmissive substrate held above a
lower substrate containing addressing circuitry. One or more electrostatically deflectable …

One embodiment is directed to a gimbal mechanism for a MEMS mirror device having folded
flexure hinges. Another embodiment is directed to a gimbal mechanism having a frame with …

A projection system, a spatial light modulator, and a method for forming micromirrors are
disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting …

An optical device includes a non-transparent substrate. The optical device further includes a
first optical layer which is at least partially transmissive and at least partially reflective to …

(57) ABSTRACT A method of manufacturing a microelectromechanical device includes
forming at least tWo conductive layers on a substrate. An isolation layer is formed betWeen …