Silicon (Si) microfabrication techniques, derived from the microelectronics industry, have
enabled the development and commercialization of microelectromechanical systems …

Testing in the microregime is relevant to many technological issues, including, for example,
evaluating the performance of established plant or new components through removal of …

Two-photon lithography (TPL) enables the design of novel micromechanical specimens,
down to sub-micron resolution, thus extending the possibilities for device and material …

The search for light yet strong materials recently benefited from novel high resolution 3D-
printing technologies, which allow for fabricating lightweight porous materials with optimally …

Provides a modern, practical approach to the understanding and measurement procedures
relevant to the fracture of brittle materials This book examines the testing and analysis of the …

A novel micromechanical device was developed to convert the compressive force applied by
a nanoindenter into pure tensile loading at the sample stages inside a scanning electron …

The etching processes used to produce microelectromechanical systems (MEMS) leave
residual surface features that typically limit device strength and, consequently, device …

A new test specimen was developed for micro-scale tensile strength measurements,
allowing direct assessment of surface effects on strength. Specimens were formed by deep …

Single-crystal silicon test specimens, fabricated by lithography and deep reactive ion etching
(DRIE), were used to measure microscale deformation and fracture properties. The …

As material structures, and devices fabricated from them, shrink to the nano-scale, it is ever
more difficult to measure accurately the mechanical properties needed for designing small …