(57) ABSTRACT A compliant UV imprint lithography template, which may also act as a
thermal implant template, and methods for manufacturing it. The template essentially …

US7309225B2 - Moat system for an imprint lithography template - Google Patents
US7309225B2 - Moat system for an imprint lithography template - Google Patents Moat system …

US7229273B2 - Imprint lithography template having a feature size under 250 nm - Google
Patents US7229273B2 - Imprint lithography template having a feature size under 250 nm …

An improved lithographic alignment method, system, and template. The method includes
creating, within a lithographic subfield, subsequent-layer features which are intentionally …

Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on
the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint …

The invention provides a method of applying an adhesion primer layer for an imprint
lithography process that includes contacting a fluid with a surface of a substrate in a coating …

US PATENT DOCUMENTS 6,890,688 B2 5/2005 Mancini et al. 6,900,881 B2 5/2005
Sreenivasan et al. 5,110,514 A 5, 1992 Soane 6,908,861 B2 6/2005 Sreenivasan et al …

US7473090B2 - Imprint lithography template to facilitate control of liquid movement - Google
Patents US7473090B2 - Imprint lithography template to facilitate control of liquid movement …

An electric heater is provided with an identifying resistor associated with a connection
between the heater and a fan control. When the electric heater is connected to the control …

The present invention provides a method adhering a layer to a substrate that features
defining first and second interfaces by having a composition present between the layer and …