A review on the size-dependent models of micro-beam and micro-plate based on the modified couple stress theory
S Kong - Archives of Computational Methods in Engineering, 2022 - Springer
Micro scale experiments demonstrated that the material deformation behaviors of some
metals and polymers deformed elasticity are size dependence, and the modified couple …
metals and polymers deformed elasticity are size dependence, and the modified couple …
A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits
A generalized foundry-oriented CMOS-MEMS platform well suited for integrated
micromechanical resonators alongside IC amplifiers has been developed for commercial …
micromechanical resonators alongside IC amplifiers has been developed for commercial …
Resonant microelectromechanical receiver
This paper reports a practical demonstration of a proposed resonant
microelectromechanical receiver for low power wake-up receiver (WuRx) applications. The …
microelectromechanical receiver for low power wake-up receiver (WuRx) applications. The …
An experimental and theoretical investigation of a micromirror under mixed-frequency excitation
We present an experimental and theoretical investigation of a micromachined mirror under a
mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of …
mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of …
[PDF][PDF] Состояние и перспективы микро-и наноэлектромеханики
ЭГ Косцов - Автометрия, 2009 - iae.nsk.su
В современной микроэлектронике наиболее интенсивно развивающимся сектором
являются микроэлектромеханические системы (MEMS—Micro-Electro-Mechanical …
являются микроэлектромеханические системы (MEMS—Micro-Electro-Mechanical …
High- Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning
Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to enable deep-
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …
submicrometer electrode-to-resonator gap spacing without interference in their mechanical …
Modeling and process design optimization of a piezoelectric micromachined ultrasonic transducers (PMUT) using lumped elements parameters
This paper proposes a novel design process of a piezoelectric micromachined ultrasonic
transducer (PMUT) for achieving the best operating performance. The electromechanical …
transducer (PMUT) for achieving the best operating performance. The electromechanical …
Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism
CC Lo, F Chen, GK Fedder - The 13th International Conference …, 2005 - ieeexplore.ieee.org
A fully differential square frame resonator (SFR), operating at resonant frequencies of 6.184
MHz and 17.63 MHz for the fundamental and 2/sup nd/harmonic, respectively, is introduced …
MHz and 17.63 MHz for the fundamental and 2/sup nd/harmonic, respectively, is introduced …
RFID MEMS sensor concept based on intermodulation distortion
V Viikari, H Seppa - IEEE Sensors Journal, 2009 - ieeexplore.ieee.org
This paper presents a passive wireless microelectromechanical systems (MEMS) sensor
consisting of an antenna directly matched to a MEMS resonator. When the sensor is …
consisting of an antenna directly matched to a MEMS resonator. When the sensor is …
MEMS logic using mixed-frequency excitation
We present multi-function microelectromechanical systems (MEMS) logic device that can
perform the fundamental logic gate AND, OR, universal logic gates NAND, NOR, and a …
perform the fundamental logic gate AND, OR, universal logic gates NAND, NOR, and a …