Reliability of HfO2-Based Ferroelectric FETs: A Critical Review of Current and Future Challenges

N Zagni, FM Puglisi, P Pavan… - Proceedings of the …, 2023 - ieeexplore.ieee.org
Ferroelectric transistors (FeFETs) based on doped hafnium oxide (HfO2) have received
much attention due to their technological potential in terms of scalability, high-speed, and …

Ferroelectric hafnium zirconium oxide compatible with back-end-of-line process

J Hur, YC Luo, N Tasneem, AI Khan… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
To scale the ferroelectric random access memory (FeRAM) technology toward 28 nm or
beyond, it is critical to develop stacked capacitor (with sufficient surface area) to allow good …

Characterizing Ferroelectric Properties of Hf0.5Zr0.5O2 From Deep-Cryogenic Temperature (4 K) to 400 K

J Hur, YC Luo, Z Wang, S Lombardo… - IEEE Journal on …, 2021 - ieeexplore.ieee.org
Ferroelectric Hf 0.5 Zr 0.5 O 2 (HZO) thin film has obtained considerable attention for
emerging non-volatile memory (eNVM) and synaptic device applications. To our best …

Improving Edge Dead Domain and Endurance in Scaled HfZrOx FeRAM

YD Lin, PC Yeh, YT Tang, JW Su… - 2021 IEEE …, 2021 - ieeexplore.ieee.org
Scaling in area and voltage and its interplay with reliability of metal-ferroelectric-metal
(MFM) capacitors are explored for scalable embedded FeRAM technology below 2× nm …

HfO₂-based ferroelectric optoelectronic memcapacitors

N Liu, J Zhou, Y Yao, S Zheng, W Feng… - IEEE Electron …, 2023 - ieeexplore.ieee.org
We report one-capacitor (1C) architecture HfO2-based ferroelectric optoelectronic
memcapacitors (FOMs), empowering with photoelectric perception and memory functions …

Sub-10 nm HfZrO ferroelectric synapse with multiple layers and different ratios for neuromorphic computing

B Chen, C Wang, X Zhan, S Wu, L Tai, J Mei… - …, 2023 - iopscience.iop.org
To break the von Neumann bottleneck, emerging non-volatile memories have gained
extensive attention in hardware implementing neuromorphic computing. The device scaling …

A technology path for scaling embedded FeRAM to 28 nm and beyond with 2T1C structure

YC Luo, J Hur, Z Wang, W Shim… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
Hf 0.5 Zr 0.5 O 2 (HZO) ferroelectric random access memory (FeRAM) has been
demonstrated in 130 nm node with 1T1C structure. To scale FeRAM to 28 nm or beyond, a …

Novel Asymmetric Operation Scheme for HfO2-based FeRAM Based on Reconstruction of Ferroelectric Dynamics Impacts

Z Fu, K Wang, S Xu, Q Huang… - IEEE Electron Device …, 2023 - ieeexplore.ieee.org
In this work, with the consideration of pulsing sequence of FeRAM operation, the impacts of
hafnia-based ferroelectric (FE) dynamics on polarization switching and memory window …

Damage-Induced Ferroelectricity in HfOx-Based Thin Film

KK Min, HM Kim, Y Kim, C Kim, J Yu… - IEEE Electron …, 2022 - ieeexplore.ieee.org
In the last decade, a surge in research on hafnium oxide (HfO x)-based ferroelectricity has
become a significant part of the semiconductor research trend. In this work, we present a …

Examination of Ferroelectric Domain Dynamics in HZO under Endurance Cycling Stress

RH Koo, W Shin, S Ryu, S Kim, G Jung… - IEEE Electron …, 2024 - ieeexplore.ieee.org
We investigate domain wall (DW) movement in hafnium zirconium oxide (HZO) under
various temperature () and cycling stresses. It is demonstrated that cycling stress distinctly …