In this letter, we present a photonics integrated piezoMEMS (PipMEMS) platform for next- generation MEMS. We demonstrate on-chip optical transduction of a piezoMEMS structure …
F Galeotti, A Fiore - Optics Express, 2021 - opg.optica.org
Sensing displacements at the nanoscale is the basis for many metrology applications, in particular atomic-force microscopy. Displacement sensing with nano-optomechanical …
MA Hamdani, G Qazi - Photonic Materials: Recent Advances and …, 2023 - books.google.com
Silicon photonics allows for high yield and complex integration with large processing, packaging, and testing availability. Using silicon as a material leverages the use of the …
The foundation of our information society resides in the invention of transistor and starting from that the development of powerful and complex hardware enabled a steady increase of …