Miniaturization of laser doppler vibrometers—a review

Y Li, E Dieussaert, R Baets - Sensors, 2022 - mdpi.com
Laser Doppler vibrometry (LDV) is a non-contact vibration measurement technique based
on the Doppler effect of the reflected laser beam. Thanks to its feature of high resolution and …

[PDF][PDF] 基于交叉相位调制效应的硅基全光Fredkin 门

虞若兰, 李军, 陈伟伟, 汪鹏君 - Acta Optica Sinica, 2021 - researching.cn
摘要虽然传统的Fredkin 门可以很好地实现相应的逻辑功能, 但是其消光比和串扰还有待进一步
改善. 鉴于此, 本文提出并设计一种基于交叉相位调制效应的硅基全光Fredkin 门 …

Photonics integrated piezomems-pipmems: A scalable hybrid platform for next-generation MEMS

V Mere, S Tiwari, A Dash, R Kallega, A Naik… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
In this letter, we present a photonics integrated piezoMEMS (PipMEMS) platform for next-
generation MEMS. We demonstrate on-chip optical transduction of a piezoMEMS structure …

Modeling a grating coupler-based interferometer for far-field-sensing of nanoscale displacements

F Galeotti, A Fiore - Optics Express, 2021 - opg.optica.org
Sensing displacements at the nanoscale is the basis for many metrology applications, in
particular atomic-force microscopy. Displacement sensing with nano-optomechanical …

Modelling Fabrication Variability in Silicon Photonic Devices.

MA Hamdani, G Qazi - Photonic Materials: Recent Advances and …, 2023 - books.google.com
Silicon photonics allows for high yield and complex integration with large processing,
packaging, and testing availability. Using silicon as a material leverages the use of the …

[PDF][PDF] Nano-opto-mechanical sensors for semiconductor metrology

F Galeotti - 2021 - research.tue.nl
The foundation of our information society resides in the invention of transistor and starting
from that the development of powerful and complex hardware enabled a steady increase of …