A survey of run-to-run control for batch processes

K Liu, YQ Chen, T Zhang, S Tian, X Zhang - ISA transactions, 2018 - Elsevier
Abstract Run-to-run (R2R) control is widely used in semiconductor manufacturing systems to
minimize the process drift, shift and variability. The R2R controller adjusts control actions or …

An extended state observer-based run to run control for semiconductor manufacturing processes

HY Wang, TH Pan, DSH Wong… - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
In this paper, an extended state observer (ESO)-based run to run (RtR) controller is
presented to suppress various stochastic disturbances emerging in the semiconductor …

Stability and performance analysis of time-delayed actuator control systems

B Ai, L Sentis, N Paine, S Han… - Journal of …, 2016 - asmedigitalcollection.asme.org
Time delay is a common phenomenon in robotic systems due to computational requirements
and communication properties between or within high-level and low-level controllers as well …

Comparative study of rack force estimation for electric power assist steering system

Y Li, T Shim, D Wang, T Offerle - Dynamic Systems …, 2017 - asmedigitalcollection.asme.org
For an electric power assist steering (EPAS) control system, it is important to know the rack
force information to improve the steering feel control performance. Since there is no direct …

İstatiksel süreç kontrolünde shewhart, cusum ve ewma kontrol kartları ile yapay sinir ağlarının bütünleşik kullanımı: bir orman endüstri işletmesinde uygulama

R Kurt - 2018 - acikerisim.bartin.edu.tr
Bu çalışmada, bir yongalevha işletmesinde kalitenin iyileştirilmesi ve maliyetlerin azaltılması
amacıyla İstatistiksel Kalite Kontrol (İKK) kartları ve Yapay Sinir Ağları (YSA) birlikte …

Dynamic predictor for linear time-delay systems with disturbances

H Caballero-Barragán, LP Osuna-Ibarra… - 2016 IEEE 55th …, 2016 - ieeexplore.ieee.org
A dynamic predictor is proposed for linear time invariant disturbed systems with delay in the
control input. The proposed dynamic predictor has a structure similar to the Luenberger …

[PDF][PDF] WHICH CONTROL CHART IS THE BEST FOR THE PARTICLEBOARD INDUSTRY: SHEWHART, CUSUM OR EWMA?

K Rifat, S KARAYILMAZLAR - 2021 - 3pn-gw.ocean.icm.edu.pl
In this study, control charts were prepared using data received from a particleboard
manufacturer to determine the factors that impair quality, and the most suitable control charts …

[引用][C] Which control chart is the best for the particleboard industry: Shewhart, CUSUM or EWMA?

R Kurt, S Karayilmazlar - Drewno. Prace Naukowe. Doniesienia. Komunikaty, 2021 - -