Cantilever-like micromechanical sensors

A Boisen, S Dohn, SS Keller, S Schmid… - Reports on Progress in …, 2011 - iopscience.iop.org
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

New materials for micro-scale sensors and actuators: An engineering review

SA Wilson, RPJ Jourdain, Q Zhang, RA Dorey… - Materials Science and …, 2007 - Elsevier
This paper provides a detailed overview of developments in transducer materials technology
relating to their current and future applications in micro-scale devices. Recent advances in …

Microscale 3D printing and tuning of cellulose nanocrystals reinforced polymer nanocomposites

A Groetsch, S Stelzl, Y Nagel, T Kochetkova… - Small, 2023 - Wiley Online Library
The increasing demand for functional materials and an efficient use of sustainable resources
makes the search for new material systems an ever growing endeavor. With this respect …

A fractographic study exploring the fracture surface topography of S355J2 steel after pseudo-random bending-torsion fatigue tests

W Macek, Z Marciniak, R Branco, D Rozumek… - Measurement, 2021 - Elsevier
This paper presents the influence of multiaxial loading and fatigue behavior on a fracture
surface in the context of its topography. For analysis were taken fracture surfaces obtained in …

Biocompatibility of su-8 and its biomedical device applications

Z Chen, JB Lee - Micromachines, 2021 - mdpi.com
SU-8 is an epoxy-based, negative-tone photoresist that has been extensively utilized to
fabricate myriads of devices including biomedical devices in the recent years. This paper …

Processing of thin SU-8 films

S Keller, G Blagoi, M Lillemose… - Journal of …, 2008 - iopscience.iop.org
This paper summarizes the results of the process optimization for SU-8 films with
thicknesses⩽ 5 µm. The influence of soft-bake conditions, exposure dose and post-exposure …

A review on surface stress-based miniaturized piezoresistive SU-8 polymeric cantilever sensors

R Mathew, A Ravi Sankar - Nano-micro letters, 2018 - Springer
In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with
piezoresistive readout combined with the advances in molecular recognition techniques …

Optimized SU-8 processing for low-cost microstructures fabrication without cleanroom facilities

VC Pinto, PJ Sousa, VF Cardoso, G Minas - Micromachines, 2014 - mdpi.com
The study and optimization of epoxy-based negative photoresist (SU-8) microstructures
through a low-cost process and without the need for cleanroom facility is presented in this …

SU-8 MEMS Fabry-Perot pressure sensor

GC Hill, R Melamud, FE Declercq, AA Davenport… - Sensors and Actuators A …, 2007 - Elsevier
The biocompatible polymer, SU-8, was used to microfabricate an interferometric pressure
sensor designed for invasive biomedical applications. Tests of the sensor in air and liquid …

Push-to-pull tensile testing of ultra-strong nanoscale ceramic–polymer composites made by additive manufacturing

J Bauer, A Schroer, R Schwaiger, I Tesari… - Extreme Mechanics …, 2015 - Elsevier
The search for light yet strong materials recently benefited from novel high resolution 3D-
printing technologies, which allow for fabricating lightweight porous materials with optimally …