[HTML][HTML] Nanoelectromechanical sensors based on suspended 2D materials

MC Lemme, S Wagner, K Lee, X Fan, GJ Verbiest… - Research, 2020 - spj.science.org
The unique properties and atomic thickness of two-dimensional (2D) materials enable
smaller and better nanoelectromechanical sensors with novel functionalities. During the last …

A review of MEMS capacitive microphones

SA Zawawi, AA Hamzah, BY Majlis, F Mohd-Yasin - Micromachines, 2020 - mdpi.com
This review collates around 100 papers that developed micro-electro-mechanical system
(MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive …

A personalized acoustic interface for wearable human–machine interaction

Z Lin, G Zhang, X Xiao, C Au, Y Zhou… - Advanced Functional …, 2022 - Wiley Online Library
Communication and interaction with machines are changing our ways of life. However,
developing an acoustic interface that simultaneously features waterproofness, wearability …

Graphene‐based dual‐function acoustic transducers for machine learning‐assisted human–robot interfaces

H Sun, X Gao, LY Guo, LQ Tao, ZH Guo, Y Shao… - InfoMat, 2023 - Wiley Online Library
Human–robot interface (HRI) electronics are critical for realizing robotic intelligence. Here,
we report graphene‐based dual‐function acoustic transducers for machine learning …

Multichannel gradient piezoelectric transducer assisted with deep learning for broadband acoustic sensing

B Lan, T Yang, G Tian, Y Ao, L Jin… - … Applied Materials & …, 2023 - ACS Publications
As an important part of human–machine interfaces, piezoelectric voice recognition has
received extensive attention due to its unique self-powered nature. However, conventional …

Sensitive transfer-free wafer-scale graphene microphones

R Pezone, G Baglioni, PM Sarro… - … applied materials & …, 2022 - ACS Publications
During the past decades micro-electromechanical microphones have largely taken over the
market for portable devices, being produced in volumes of billions yearly. Because …

Ultra-sensitive graphene membranes for microphone applications

G Baglioni, R Pezone, S Vollebregt, KC Zobenica… - Nanoscale, 2023 - pubs.rsc.org
Microphones exploit the motion of suspended membranes to detect sound waves. Since the
microphone performance can be improved by reducing the thickness and mass of its …

High-yield large-scale suspended graphene membranes over closed cavities for sensor applications

S Lukas, A Esteki, N Rademacher, V Jangra, M Gross… - ACS …, 2024 - ACS Publications
Suspended membranes of monatomic graphene exhibit great potential for applications in
electronic and nanoelectromechanical devices. In this work, a “hot and dry” transfer process …

Recent trends in structures and interfaces of MEMS transducers for audio applications: A review

A Gemelli, M Tambussi, S Fusetto, A Aprile, E Moisello… - Micromachines, 2023 - mdpi.com
In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an
impressive impact in the field of acoustic transducers, allowing the development of smart …

A review of acoustic devices based on suspended 2D materials and their composites

Z Wan, H Liu, Y Zheng, Y Ma, K Liu… - Advanced Functional …, 2024 - Wiley Online Library
Acoustic devices play an increasingly important role in modern society for information
technology and intelligent systems, and recently significant progress has been made in the …