Scheduling in semiconductor manufacturing is of vital importance due to the impact on
production performance indicators such as equipment utilization, cycle time, and delivery …

In this paper, we discuss scheduling problems in semiconductor manufacturing. Starting
from describing the manufacturing process, we identify typical scheduling problems found in …

Due to the high investment costs in semiconductor manufacturing facilities (wafer fabs), it is
crucial to ensure high utilisation rates of tools. And, by performing the right qualifications of …

This paper addresses a Stochastic Flexible Job-Shop Scheduling Problem (SFJSSP) in the
context of semiconductor manufacturing. Semiconductor industry is among the most capital …

In order to process a product in a semiconductor back-end facility, a machine needs to be
qualified, first by having product-specific software installed and then running test wafers …

This paper is concerned with the qualification management problem of parallel machines
under high uncertainties in the semiconductor manufacturing industry. Product–machine …

In order to process a product in a semiconductor back-end facility, a machine needs to be
qualified first by having a product-specific software program installed on it. Then a tool set …

In this thesis, capacity allocation is modeled for a semiconductor fabrication facility (wafer
fab), with measures and methods that optimize the capacity allocation of wafer fabs. The …

In semiconductor manufacturing, as in most manufacturing contexts, preventive
maintenance is required to avoid machine failures and to ensure product quality. In this …

In this paper, a detailed discrete event simulation model is used to better understand the
effects of recipe constraints resulting from process restrictions and tool capabilities on …