This paper describes a split-mode tuning fork MEMS gyroscope with CMOS readout circuit.
The gyroscope achieves 0.008°/angle random walk (ARW) and 0.08°/h bias instability (BI) …

A vibrating ring gyroscope is operated in AM and FM mode to demonstrate improved long-
term stability of FM operation. Both bias and scale-factor (SF) accuracy were tested over a …

This paper demonstrates a dual-mode actuation and sensing scheme for differential
operation and self-calibration of axisymmetric Coriolis resonant gyroscopes. The proposed …

Bias stability is an important performance indicator for MEMS gyroscopes. In this paper, a
gyroscope zero rate output (ZRO) model under force-to-rebalance (FTR) closed-loop …

The quadrature coupling error is an important factor that affects the detection output of
microelectromechanical system (MEMS) gyroscopes. In this study, two quadrature error …

Background calibration is used to reduce three dominant error sources in MEMS gyroscopes
over manufacturing variations, temperature, and aging.(1) Measuring the ratio of the change …

This paper focuses on automatic temperature sensitivity calibration and nonlinearity
optimization of the scale factor (SF) for micro-electromechanical system gyroscopes under …

Phase error of the demodulation clock in the Coriolis vibratory gyroscope system allows the
quadrature errors to leak into the sense channel and causes significant bias and …

Future, fully automated vehicles pose strict requirements on the performance of inertial
sensors. Achievable accuracies of micro-electromechanical (MEMS) gyroscopes are …

MEMS gyroscopes have become an essential component in consumer, industrial and
automotive applications, owing to their small form factor and low production cost. However …