Y Oshima, EG Víllora, Y Matsushita… - Journal of Applied …, 2015 - pubs.aip.org
Epitaxial growth of ε-Ga 2 O 3 is demonstrated for the first time. The ε-Ga 2 O 3 films are
grown on GaN (0001), AlN (0001), and β-Ga 2 O 3 ( 2 01) by halide vapor phase epitaxy …