Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Micro-optical components for bioimaging on tissues, cells and subcellular structures

H Yang, Y Zhang, S Chen, R Hao - Micromachines, 2019 - mdpi.com
Bioimaging generally indicates imaging techniques that acquire biological information from
living forms. Among different imaging techniques, optical microscopy plays a predominant …

High-precision low-cost gimballing platform for long-range railway obstacle detection

EH Assaf, C von Einem, C Cadena, R Siegwart… - Sensors, 2022 - mdpi.com
Increasing demand for rail transportation results in denser and more high-speed usage of
the existing railway network, making new and more advanced vehicle safety systems …

A pan–tilt orienting mechanism with parallel axes of flexural actuation

YC Lee, CC Lan, CY Chu, CM Lai… - … /ASME Transactions on …, 2012 - ieeexplore.ieee.org
This paper presents the design and prototype of a camera-orienting mechanism. Bioinspired
actuators and mechanisms have been developed to pan and tilt a camera with comparable …

Internal model-based robust tracking control design for the MEMS electromagnetic micromirror

J Tan, W Sun, JTW Yeow - Sensors, 2017 - mdpi.com
The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely
employed in different areas, such as scanning, imaging and optical switching. This paper …

H∞ robust control of a large-piston MEMS micromirror for compact fourier transform spectrometer systems

H Chen, M Li, Y Zhang, H Xie, C Chen, Z Peng, S Su - Sensors, 2018 - mdpi.com
Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into
Fourier transform spectral acquisition systems can greatly reduce the size of the …

Modeling and control of a large-stroke electrothermal MEMS mirror for Fourier transform microspectrometers

F Han, W Wang, X Zhang, H Xie - Journal of …, 2016 - ieeexplore.ieee.org
A microelectromechanical systems (MEMS) mirror with large vertical displacement has been
developed for Fourier transform microspectrometers, but there exists a large tilting during the …

Barrier lyapunov function-based output regulation control of an electromagnetic micromirror with transient performance constraint

W Sun, H Chen, JTW Yeow - IEEE Transactions on Systems …, 2021 - ieeexplore.ieee.org
This article investigates the controller design problem for an electromagnetic torsional
micromirror with guaranteed transient performance constraint. Specifically, the developed …

Electrothermally-actuated micromirrors with bimorph actuators—Bending-type and torsion-type

CH Tsai, CW Tsai, HT Chang, SH Liu, JC Tsai - Sensors, 2015 - mdpi.com
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph
actuators are proposed. The devices are fabricated with the SOIMUMPs process developed …

Second-order sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes

H Chen, WJ Sun, ZD Sun… - Journal of Micromechanics …, 2012 - iopscience.iop.org
A second-order sliding mode control (2-SMC) scheme with a proportional integral derivative
(PID) sliding surface, to achieve enhanced transient response, accurate positioning and …