Characterization and Multiscale Modeling of TDDB in State-of-the-art BEOL
A Palmieri, M Tavakoli, C Ching… - 2024 IEEE …, 2024 - ieeexplore.ieee.org
For the first time, we characterize the advanced Black Diamond® low-k dielectric and
develop a physical model of time dependent dielectric breakdown (TDDB). We use the …
develop a physical model of time dependent dielectric breakdown (TDDB). We use the …