This book deals with 3D nanodevices such as nanowire and nanosheet transistors at 7 nm
and smaller technology nodes. It discusses technology computer-aided design (TCAD) …

Automated inspection systems have been used extensively for high-speed defect detection,
gaging and quality control. In the semiconductor manufacturing industry, assembly and …

In a globally competitive environment, sustaining high yield with a minimum number of
quality controls is key for manufacturing plants to remain competitive. In modern …

This chapter illustrates the magnificence of the fabless semiconductor ecosystem. It
discusses the history of the semiconductor industry, including the invention of the basic …

This paper presents a novel indicator called PIC (Permanent Index per Context) and it uses
to support industrial implementation of dynamic control plans in semiconductor …

Rapid process diagnosis is a very challenging task for the manufacturing industries in order
to maintain the product quality and to reduce the production cost. Process diagnosis became …

Control limits in use at metrology stations are traditionally set by yield requirements. Since
excursions from these limits usually trigger machine stoppage, the monitor design has a …

Defect diagnosis in semiconductor manufacturing is crucial to improve the product quality
and to reduce the production cost. When defect is recognized, the objective is to identify …

Defectivity control in semiconductor manufacturing is crucial to improve the product quality
and to reduce the production cost. When defects are detected, the objective is to identify the …

In semiconductor manufacturing system, diagnosis method consists in measuring and
comparing similar samples that are taken at the same process level, processed by the same …