[HTML][HTML] Status and prospects of plasma-assisted atomic layer deposition

H Knoops, T Faraz, K Arts, WMM Kessels - Journal of Vacuum Science …, 2019 - pubs.aip.org
Processing at the atomic scale is becoming increasingly critical for state-of-the-art electronic
devices for computing and data storage, but also for emerging technologies such as related …

Atomic layer deposition of thin films: from a chemistry perspective

J Li, G Chai, X Wang - International Journal of Extreme …, 2023 - iopscience.iop.org
Atomic layer deposition (ALD) has become an indispensable thin-film technology in the
contemporary microelectronics industry. The unique self-limited layer-by-layer growth …

Self-assembly construction of NiCo LDH/ultrathin gC3N4 nanosheets photocatalyst for enhanced CO2 reduction and charge separation mechanism study

AQ Zhou, JM Yang, XW Zhu, XL Zhu, JY Liu, K Zhong… - Rare Metals, 2022 - Springer
Graphite phase carbon nitride (g-C3N4) is a promising catalyst for artificial photocatalytic
carbon dioxide (CO2) reduction. However, the fast carrier recombination and the …

Doping and Interfacial Engineering of MoSe2 Nanosheets by NH3 Plasma Promoted Pt for Methanol Electrolysis

Y Kuang, W Qiao, S Wang, F Yang… - ACS Materials Letters, 2024 - ACS Publications
The electrochemical methanol–hydrogen transformation as a significant technique for
hydrogen generation is limited by a low Pt catalytic efficiency. Herein, the doping and …

[HTML][HTML] Comparison of hexagonal boron nitride and MgO tunnel barriers in Fe, Co magnetic tunnel junctions

H Lu, J Robertson, H Naganuma - Applied Physics Reviews, 2021 - pubs.aip.org
Magnetic tunnel junctions (MTJ) with MgO/Fe based interfaces and out-of-plane spin
direction form the basis of present-day spin-transfer-torque magnetic random-access …

Review—Cobalt Thin Films: Trends in Processing Technologies and Emerging Applications

AE Kaloyeros, Y Pan, J Goff… - ECS Journal of Solid State …, 2019 - iopscience.iop.org
Cobalt metallic films are the subject of an ever-expanding academic and industrial interest
for incorporation into a multitude of new technological applications. This report reviews the …

Atomic layer deposition of InN using trimethylindium and ammonia plasma

P Deminskyi, P Rouf, IG Ivanov… - Journal of Vacuum …, 2019 - pubs.aip.org
Indium nitride (InN) is a low bandgap, high electron mobility semiconductor material of
interest to optoelectronics and telecommunication. Such applications require the deposition …

Deposition of triazine-based graphitic carbon nitride via plasma-induced polymerisation of melamine

C Ruhmlieb, M Taplick, M Nissen, I Baev… - Journal of Materials …, 2022 - pubs.rsc.org
We present a novel plasma-assisted approach to deposit crystalline triazine-based graphitic
carbon nitride directly onto solid substrates by fast and specific polymerisation of 2, 4, 6 …

Electrochemical activation of atomic layer-deposited cobalt phosphate electrocatalysts for water oxidation

R Zhang, G van Straaten, V Di Palma… - ACS …, 2021 - ACS Publications
The development of efficient and stable earth-abundant water oxidation catalysts is vital for
economically feasible water-splitting systems. Cobalt phosphate (CoPi)-based catalysts …

Density functional theory study on the selective capping of cobalt on copper interconnect

K Khumaini, R Hidayat, TR Mayangsari… - Applied Surface …, 2022 - Elsevier
The selective Co capping is essential for improving the electromigration resistance of the
copper interconnects. We studied the mechanism of selective Co deposition using CpCo …