The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

The objective of this article is to review the recent advancement in piezoelectric
micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric …

Flexible and wearable sensors are highly desired for health monitoring, agriculture, sport,
and indoor positioning systems applications. However, the currently developed wireless …

This paper presents an airborne piezoelectric micromachined ultrasonic transducers
(PMUTs) operated at low frequency (40-50 kHz) for long-range detection, where the acoustic …

Piezoelectric micromachined ultrasonic transducers (pMUTs) have attracted widespread
attentions on account of their vital applications in medical imaging, fingerprint identification …

Real-world sensory-processing applications require compact, low-latency, and low-power
computing systems. Enabled by their in-memory event-driven computing abilities, hybrid …

With increasing concerns about noise pollution, the pursuit of highly dependable
piezoelectric acoustic sensors for real‐time noise monitoring has come to the forefront of …

In this study, we fabricated a row-column addressed 2-dimensional piezoelectric
micromachined ultrasonic transducer (pMUT) array based on the monocrystalline Pb (Zr, Ti) …

Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly
developed in the last decade. With high output pressure to enable long-range detection and …

In this paper, air-coupled piezoelectric micromachined ultrasonic transducers (PMUTs)
using 36% scandiumdoped aluminum nitride (ScAlN) thin-film are presented. ScAlN is …