The paper presents an overview and reports the recent progress of research on squeeze
film air damping in MEMS. The review starts with the governing equations of squeeze film air …

This paper presents a design methodology for a two-dimensional (2-D) electrostatic torsion
micromirror fabricated with bulk-micromachining technology. The theoretical models in …

Damping in resonating MEMS mirrors has a profound effect on the dynamical behavior. The
validity of the existing theories is investigated in this work by theoretical and experimental …

Damping performance of lightweight composite structures, like fibre reinforced plastics
(FRPs) is more efficient than the conventional materials. This phenomena was found …

This paper proposes an analytical model for calculating the squeeze-film air damping of a
rectangular torsion mirror at finite normalized tilting angles. The general Reynolds equation …

A semi-analytical approach is presented to model the effects of complicated boundary
conditions and rarefaction on the squeeze-film damping dependent quality factor in a double …

Squeeze film damping is an important factor in the dynamic stability of the bi‐axial
microelectromechanic systems. The purpose of this article is to provide an analytical solution …

This paper presents a physical analysis of the biomimetic microphone designed with a
central-supported (CS) diaphragm for the sound source localization. A clover-stem-like CS …

We have demonstrated microfabricated, monolithic two degrees of freedom (two-
dimensional) electrostatic torsional mirrors using a three-mask process on silicon-on …

Micromechanical structures that have squeeze-film damping as the dominant energy
dissipation mechanism are of interest in this paper. For such structures with narrow air gap …