Originally developed in the late 1960s, anodic bonding, also known as electrostatic bonding,
field-assisted bonding or Mallory bonding, has become one of the most important silicon …

With increasing demands for wireless sensing nodes for assets control and condition
monitoring; needs for alternatives to expensive conventional accelerometers in vibration …

Researchers have been looking for alternatives of expensive conventional accelerometers
in vibration measurements. Micro-ElectroMechanical Systems (MEMS) accelerometer is one …

Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the
development of next-generation mobile, wearable and implantable devices. However, these …

The diffusion of micro electro-mechanical systems (MEMS) technology applied to navigation
systems is rapidly increasing, but currently, there is a lack of knowledge about the reliability …

This chapter describes the state of the art in maintenance and its future trends. The key
areas that have influenced maintenance in the last 40 years are management of people and …

This paper reports the development of piezoresistive accelerometers based on an
asymmetrically gapped cantilever which is composed of a bottom mechanical layer and a …

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer
with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS …

Abstract Micro-Electro Mechanical Systems (MEMS)-based sensing elements are gaining
wider acceptance and adoption for static and dynamic (mobile) applications. Recent …

MEMS accelerometers have received attention owing to their low cost and small size.
Accurate vibration measurements of both amplitude and phase, in the measurement …