On-machine and in-process surface metrology for precision manufacturing
On-machine and in-process surface metrology are important for quality control in
manufacturing of precision surfaces. The classifications, requirements and tasks of on …
manufacturing of precision surfaces. The classifications, requirements and tasks of on …
Review of hybrid methods and advanced technologies for in-process metrology in ultra-high-precision single-point diamond turning
S Hatefi, K Abou-El-Hossein - The International Journal of Advanced …, 2020 - Springer
Single-point diamond turning (SPDT) is a leading machining technology for advanced
manufacturing of high-accuracy optical components characterized by their nanometric …
manufacturing of high-accuracy optical components characterized by their nanometric …
Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures
Achieving nanometric surface on single-crystal silicon is important for semiconductor and
optoelectronics industries. In recent years, thermal assisted machining (hot machining) …
optoelectronics industries. In recent years, thermal assisted machining (hot machining) …
Sculpturing of single crystal silicon microstructures by elliptical vibration cutting
Single crystal silicon is necessarily subjected to mechanical precision machining to fulfill its
applications in semiconductor and optoelectronics industries. However, brittle defects are …
applications in semiconductor and optoelectronics industries. However, brittle defects are …
Towards understanding the mechanism of vibration-assisted cutting of monocrystalline silicon by cyclic nanoindentation
W Huang, J Yan - Journal of Materials Processing Technology, 2023 - Elsevier
Ultrasonic vibration cutting (UVC) is a promising technology that can promote the processing
of hard-brittle materials in ductile mode. The feature of intermittent cutting in UVC is …
of hard-brittle materials in ductile mode. The feature of intermittent cutting in UVC is …
Diamond cutting of micro-structure array on brittle material assisted by multi-ion implantation
Micro-structures have numerous applications for improving the surface functionability in
various fields, such as surface mechanics, optics, and biology. However, machining micro …
various fields, such as surface mechanics, optics, and biology. However, machining micro …
Field-assisted machining of difficult-to-machine materials
Difficult-to-machine materials (DMMs) are extensively applied in critical fields such as
aviation, semiconductor, biomedicine, and other key fields due to their excellent material …
aviation, semiconductor, biomedicine, and other key fields due to their excellent material …
A novel ductile machining model of single-crystal silicon for freeform surfaces with large azimuthal height variation by ultra-precision fly cutting
Ultra-precision fly cutting (UPFC) is an important technology in the fabrication of freeform
surfaces on single-crystal silicon. However, the insufficient understanding of the ductile …
surfaces on single-crystal silicon. However, the insufficient understanding of the ductile …
Surface textures fabricated by laser surface texturing and diamond cutting–influence of texture depth on friction and wear
In the present work, the authors study the tribological characteristics of textured stainless
steel surfaces with different texture depths ranging from 1.3 to 23 µm created by laser …
steel surfaces with different texture depths ranging from 1.3 to 23 µm created by laser …
Nanosecond pulsed laser ablation of silicon—finite element simulation and experimental validation
In the present work, we perform finite element simulations to investigate the ablated surface
morphology of silicon by nanosecond pulsed laser ablation using low laser fluences ranging …
morphology of silicon by nanosecond pulsed laser ablation using low laser fluences ranging …