Electron dynamics in low pressure capacitively coupled radio frequency discharges
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …
important current research topic that is relevant for many applications. Particularly, in the low …
eduPIC: an introductory particle based code for radio-frequency plasma simulation
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …
swarms and low-temperature plasma sources. The main advantage of such approaches is …
Actinometry of O, N and F atoms
DV Lopaev, AV Volynets, SM Zyryanov… - Journal of Physics D …, 2017 - iopscience.iop.org
The applicability of actinometry for measuring the absolute concentration of O, N and F
atoms in discharge plasma was studied. For this purpose, concentrations of these atoms …
atoms in discharge plasma was studied. For this purpose, concentrations of these atoms …
The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures
The effects of electron induced secondary electron (SE) emission from SiO 2 electrodes in
single-frequency capacitively coupled plasmas (CCPs) are studied by particle-in-cell/Monte …
single-frequency capacitively coupled plasmas (CCPs) are studied by particle-in-cell/Monte …
On the importance of excited state species in low pressure capacitively coupled plasma argon discharges
DQ Wen, J Krek, JT Gudmundsson… - Plasma Sources …, 2023 - iopscience.iop.org
In the past three decades, first principles-based fully kinetic particle-in-cell Monte Carlo
collision (PIC/MCC) simulations have been proven to be an important tool for the …
collision (PIC/MCC) simulations have been proven to be an important tool for the …
The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges
The effect of changing the driving frequency on the plasma density and the electron
dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few …
dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few …
The effect of electron induced secondary electrons on the characteristics of low-pressure capacitively coupled radio frequency plasmas
We investigate the effects of secondary electrons (SEs), induced by electrons impinging on
the electrodes, on the characteristics of low-pressure single-frequency capacitively coupled …
the electrodes, on the characteristics of low-pressure single-frequency capacitively coupled …
Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon
The particle-in-cell/Monte Carlo collisions (PIC/MCC) simulation approach has become a
standard and well-established tool in studies of capacitively coupled radio frequency (RF) …
standard and well-established tool in studies of capacitively coupled radio frequency (RF) …
Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
In most PIC/MCC simulations of radio frequency capacitively coupled plasmas (CCPs)
several simplifications are commonly made:(i) fast neutrals are not traced,(ii) heavy particle …
several simplifications are commonly made:(i) fast neutrals are not traced,(ii) heavy particle …
The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
We investigate the electron heating dynamics in electropositive argon and helium
capacitively coupled RF discharges driven at 13.56 MHz by particle-in-cell simulations and …
capacitively coupled RF discharges driven at 13.56 MHz by particle-in-cell simulations and …