Direct current microhollow cathode discharges on silicon devices operating in argon and helium
Microhollow cathode discharges have been produced on silicon platforms using processes
usually used for MEMS fabrication. Microreactors consist of 100 or 150 μm-diameter cavities …
usually used for MEMS fabrication. Microreactors consist of 100 or 150 μm-diameter cavities …
Electric field strengths within a micro cavity plasma array measured by Stark shift and splitting of a helium line pair
The electric field is a fundamental parameter for plasma sources and devices. Its knowledge
is a dominant setscrew for many processes such as controllable fluxes and energies of …
is a dominant setscrew for many processes such as controllable fluxes and energies of …
Modular constructed metal-grid arrays—an alternative to silicon-based microplasma devices for catalytic applications
S Dzikowski, R Michaud, H Böttner… - Plasma Sources …, 2020 - iopscience.iop.org
Here, we present a modular constructed metal-grid micro cavity plasma array as a flexible,
robust, and simple alternative to micro-structured devices based on silicon. They show great …
robust, and simple alternative to micro-structured devices based on silicon. They show great …