One of the key challenges faced by hypersonic flying is the complex thermal–mechanical–
chemical coupling effect between thermal protection materials and non-equilibrium flow …

Gas sensors are devices that can detect and/or discriminate gases in their surroundings.
Some of these devices are based on vibrating structure covered with a coating sensitive to …

3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical
properties (high Young's modulus and low density) that allow the device to be operated for a …

Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due
to its unique combination of electrical, mechanical and chemical properties combined with …

Since decades, silicon carbide (SiC) has been avowed as an interesting material for
highpower and high-temperature applications because of its significant properties including …

A self‐consistent method is used for the determination of the residual stress and the effective
Young's modulus of thin 3C‐SiC (111) grown on Si (111), and 3C‐SiC (100) grown on Si …

This manuscript presents an analysis of the energy dissipation mechanisms in
microelectromechanical systems (MEMS)-based, flexural-mode polycrystalline silicon …

Gas sensors are devices that can detect and/or discriminate gases in their surroundings.
Usually, these kinds of sensors are based on vibrating structures with a coating sensitive to …

The aim of this paper is to review the recent developments conducted for the achievement of
3C-SiC‑based heterostructures compatible with MEMS applications. Indeed, the research …

In this paper, the structural design and experiment of MEMS resonators for accurately
measuring Young's modulus is described. To establish an accurate measurement technique …