Advancements in secondary and backscattered electron energy spectra and yields analysis: From theory to applications

S Taioli, M Dapor - Surface Science Reports, 2024 - Elsevier
Over the past decade, experimental microscopy and spectroscopy have made significant
progress in the study of the morphological, optical, electronic and transport properties of …

Model-based SEM for dimensional metrology tasks in semiconductor and mask industry

CG Frase, D Gnieser, H Bosse - Journal of Physics D: Applied …, 2009 - iopscience.iop.org
The requirements on the use of scanning electron microscopy (SEM) as a measurement
technique for the process control of dimensional parameters are most challenging in the …

The impact of new Geant4-DNA cross section models on electron track structure simulations in liquid water

I Kyriakou, M Šefl, V Nourry, S Incerti - Journal of Applied Physics, 2016 - pubs.aip.org
The most recent release of the open source and general purpose Geant4 Monte Carlo
simulation toolkit (Geant4 10.2 release) contains a new set of physics models in the Geant4 …

Nuclear fusion reactions in deuterated metals

V Pines, M Pines, A Chait, BM Steinetz, LP Forsley… - Physical Review C, 2020 - APS
Nuclear fusion reactions of DD are examined in an environment comprised of high density
cold fuel embedded in metal lattices in which a small fuel portion is activated by hot …

Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical dimension scanning electron microscope (CD-SEM)

MSS Khan, SF Mao, YB Zou, YG Li, B Da… - Journal of Applied …, 2023 - pubs.aip.org
In recent years, precision and accuracy for a more precise critical dimension (CD) control
have been required in CD measurement technology. CD distortion between the …

Inelastic mean free path of low‐energy electrons in condensed media: beyond the standard models

D Emfietzoglou, I Kyriakou… - Surface and Interface …, 2017 - Wiley Online Library
The most established approach for 'practical'calculations of the inelastic mean free path
(IMFP) of low‐energy electrons (~ 10 eV to~ 10 keV) is based on optical‐data models of the …

Calculations of electron stopping powers for 41 elemental solids over the 50 eV to 30 keV range with the full Penn algorithm

H Shinotsuka, S Tanuma, CJ Powell… - Nuclear Instruments and …, 2012 - Elsevier
We present mass collision electron stopping powers (SPs) for 41 elemental solids (Li, Be,
graphite, diamond, glassy C, Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo …

Bismuth oxide-based nanocomposite for high-energy electron radiation shielding

S Chen, S Nambiar, Z Li, E Osei, J Darko… - Journal of Materials …, 2019 - Springer
A novel polymer-based nanocomposite was fabricated to investigate its shielding properties
against high-energy electron radiation for potential applications in space industry. Bismuth …

Analysis of electron beam induced deposition (EBID) of residual hydrocarbons in electron microscopy

K Rykaczewski, WB White, AG Fedorov - Journal of Applied Physics, 2007 - pubs.aip.org
In this work we have developed a comprehensive dynamic model of electron beam induced
deposition (EBID) of residual hydrocarbon coupling mass transport, electron transport and …

Electron spectroscopies and inelastic processes in nanoclusters and solids: Theory and experiment

S Taioli, S Simonucci, L Calliari, M Dapor - Physics reports, 2010 - Elsevier
The recent, very significant developments in high intensity and brightness electron and
photon sources have opened new possibilities of applying electron spectroscopies, such as …