Shrinking process tolerances due to decreasing device sizes and increasing chip complexity
in semiconductor manufacturing are motivating efforts to improve methods of equipment …

Clock synchronization is becoming an increasingly important characteristic of modern wide
area monitoring and control systems such as the power grid. It provides an opportunity to …

Practical implementations in distributed model based control face a fundamental trade-off
between model complexity and the number of modeled nodes. For linear systems, higher …

Die Umwandlung von nahezu unbegrenzt verfügbarer Sonnenenergie in elektrische
Energie gilt als ein vielversprechender Ansatz, um den wachsenden Energiebedarf weltweit …

In this paper we introduce a SOA based EDA system complied with SEMI Standards for
smart factory in semiconductor manufacturing filed To design the system that is used to …

Simulation models are often used in parallel with a physical system to facilitate control,
diagnosis and monitoring. Model based methods for control, diagnosis and monitoring form …

In this paper we design and implement a new Hybrid Equipment Data Acquisition System
(HEDAS) for data collection of semiconductor and optoelectronic manufacturing equipments …

Shrinking process tolerances due to decreasing device sizes and increasing chip complexity
in semiconductor manufacturing are motivating efforts to improve methods for real-time …