Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

Nanoelectromechanical systems NEMS are drawing interest from both technical and
scientific communities. These are electromechanical systems, much like …

This paper presents a method for optimal design of compliant mechanism topologies. The
method is based on continuum-type topology optimization techniques and finds the optimal …

This review paper focuses on interdigital electrodes-a geometric structure encountered in a
wide variety of sensor and transducer designs. Physical and chemical principles behind the …

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

Microelectromechanical systems (MEMS) have recently become an important area of
technology, building on the success of the microelectronics industry over the past 50 years …

We report the development of a material testing system for in situ electron microscopy (EM)
mechanical testing of nanostructures. The testing system consists of an actuator and a load …

A new micromachined gyroscope based on a vibrating ring is described. The device
measures rotation rate or whole angle inertial rotation by monitoring the position of node …

Silicon-based MEMS techniques dominate sub-millimeter scale manufacturing, while a
myriad of conventional methods exist to produce larger machines measured in centimeters …