Optical Properties of TiO2 Grown by Atomic Layer Deposition Using Various Oxidizing Agents: The Ellipsometry Analysis of Absorption Properties
JL Vazquez‐Arce, T Suta, B Fodor… - Advanced Materials …, 2024 - Wiley Online Library
This study analyzes the optical properties of TiO2 films grown via atomic layer deposition
(ALD) using Tetrakis (dimethylamino) titanium with oxidizing agents such as H2O, H2O2 …
(ALD) using Tetrakis (dimethylamino) titanium with oxidizing agents such as H2O, H2O2 …
[PDF][PDF] Optical Properties of TiO
This study analyzes the optical properties of TiO2 films grown via atomic layer deposition
(ALD) using Tetrakis (dimethylamino) titanium with oxidizing agents such as H2O, H2O2 …
(ALD) using Tetrakis (dimethylamino) titanium with oxidizing agents such as H2O, H2O2 …