Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

OO Versolato, J Sheil, S Witte, W Ubachs… - Journal of …, 2022 - iopscience.iop.org
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …

Optimization of extreme ultra-violet light emitted from the CO2 laser-irradiated tin plasmas using 2D radiation hydrodynamic simulations

A Sunahara, A Hassanein, K Tomita, S Namba… - Optics …, 2023 - opg.optica.org
We studied Extreme Ultra-Violet (EUV) emission characteristics of the 13.5 nm wavelength
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …

[HTML][HTML] Strongly anisotropic ion emission in the expansion of Nd: YAG-laser-produced plasma

L Poirier, DJ Hemminga, A Lassise, L Assink… - Physics of …, 2022 - pubs.aip.org
We present results from a combined experimental and numerical simulation study of the
anisotropy of the expansion of a laser-produced plasma into vacuum. Plasma is generated …

Mass partitioning in fragmenting tin sheets

B Liu, RA Meijer, W Li, J Hernandez-Rueda… - Physical Review …, 2023 - APS
We experimentally study the mass partitioning of a fragmenting liquid sheet formed after the
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …

[HTML][HTML] Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources

DJ Hemminga, OO Versolato, J Sheil - Physics of Plasmas, 2023 - pubs.aip.org
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by
laser wavelengths in the λ laser= 1.064− 10.6 μ m range and laser intensities of I laser= 0.5 …

Effects of surface oxide layer on the impact dynamic behavior of molten aluminum droplets

W Yang, R Yang, Y Yao, Z Gao, H Zhang - Physics of Fluids, 2023 - pubs.aip.org
Oxide layer is easily formed on the surface of some metal droplets, which affects the
dynamic behavior of droplet impact. In this paper, experiments were conducted for the …

[HTML][HTML] Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma

Y Mostafa, L Behnke, DJ Engels, Z Bouza… - Applied Physics …, 2023 - pubs.aip.org
We demonstrate the efficient generation of extreme ultraviolet (EUV) light from laser-
produced plasma (LPP) driven by 2 μm wavelength laser light as an alternative for 10 μm …

[HTML][HTML] The transition from short-to long-timescale pre-pulses: Laser-pulse impact on tin microdroplets

RA Meijer, D Kurilovich, KSE Eikema… - Journal of Applied …, 2022 - pubs.aip.org
We experimentally study the interaction of intense laser pulses with metallic microdroplets
and the resulting deformation. Two main droplet deformation regimes have previously been …

Speed of fragments ejected by an expanding liquid tin sheet

B Liu, J Hernandez-Rueda, H Gelderblom… - Physical Review …, 2022 - APS
We experimentally investigate the speed of fragments produced by ligament breakup in the
laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments …

Pulse electromagnetic flow of Jeffrey fluid in parallel plate microchannels

D Li, K Li, H Li - Physica Scripta, 2023 - iopscience.iop.org
This paper investigates the pulse electromagnetic flow of a Jeffery fluid between parallel
plate microchannels, where the pulse is considered as a relatively stable and common …