Acceleration sensors are tools for detecting acceleration and serve purposes like fault
monitoring and behavior recognition. It is extensively employed in a variety of industries …

Polymers are ever more widely and more prominently used in microelectromechanical
systems. They provide significant added value to the existing silicon-based technologies …

Long-term gyroscope drift can be effectively removed by employing simultaneous on-chip
stress and temperature compensation. Stress effects are significant and their inclusion …

Electrodeposited Au-based micro-electromechanical systems (MEMS) capacitive
accelerometers with Ti/Au multi-layered structures are promising devices for detecting very …

This study designs and implements a stress isolation guard-ring structure to improve the
performances of the existing single proof-mass three-axis piezoresistive accelerometer …

Light detection and ranging (LiDAR) devices based on micro-electromechanical systems
(MEMS) micromirrors have been promising sensors for automatic driving due to the …

The demand for wafer stacking technology has been increasing significantly. Although many
technical challenges of wafer stacking have improved greatly, there are still many …

This paper presents beam modeling techniques for maximizing mechanical sensitivity of a
butterfly resonator for gyroscopic applications. We investigate the geometric aspects of …

This work is concerned with the examination of one-dimensional stress effects in mode-split,
open-loop MEMS gyroscopes with the goal to predict the sensitivity change under printed …

This paper presents a high-resolution capacitive stress sensor array to precisely
characterize the distributed MEMS packaging stress, for the first time. The unit stress …