Highly charged ions: Optical clocks and applications in fundamental physics

MG Kozlov, MS Safronova… - Reviews of Modern …, 2018 - APS
Recent developments in frequency metrology and optical clocks have been based on
electronic transitions in atoms and singly charged ions as references. The control over all …

Physics of laser-driven tin plasma sources of EUV radiation for nanolithography

OO Versolato - Plasma Sources Science and Technology, 2019 - iopscience.iop.org
Laser-produced transient tin plasmas are the sources of extreme ultraviolet (EUV) light at
13.5 nm wavelength for next-generation nanolithography, enabling the continued …

The Heidelberg compact electron beam ion traps

P Micke, S Kühn, L Buchauer, JR Harries… - Review of Scientific …, 2018 - pubs.aip.org
Highly charged ions (HCIs) constitute a large class of atomic systems since each element
has as many ionization states as it has protons—in a sense, this extends the periodic table …

Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser

L Behnke, R Schupp, Z Bouza, M Bayraktar… - Optics express, 2021 - opg.optica.org
An experimental study of laser-produced plasmas is performed by irradiating a planar tin
target by laser pulses, of 4.8 ns duration, produced from a KTP-based 2-µm-wavelength …

Plasma propulsion of a metallic microdroplet and its deformation upon laser impact

D Kurilovich, AL Klein, F Torretti, A Lassise… - Physical review applied, 2016 - APS
The propulsion of a liquid indium-tin microdroplet by nanosecond-pulse laser impact is
experimentally investigated. We capture the physics of the droplet propulsion in a scaling …

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

OO Versolato, J Sheil, S Witte, W Ubachs… - Journal of …, 2022 - iopscience.iop.org
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …

Optimization of extreme ultra-violet light emitted from the CO2 laser-irradiated tin plasmas using 2D radiation hydrodynamic simulations

A Sunahara, A Hassanein, K Tomita, S Namba… - Optics …, 2023 - opg.optica.org
We studied Extreme Ultra-Violet (EUV) emission characteristics of the 13.5 nm wavelength
from CO_2 laser-irradiated pre-formed tin plasmas using 2D radiation hydrodynamic …

[HTML][HTML] The development of laser-produced plasma EUV light source

DK Yang, D Wang, QS Huang, Y Song, J Wu, WX Li… - Chip, 2022 - Elsevier
Extreme ultraviolet lithography (EUVL) has been demonstrated to meet the industrial
requirements of new-generation semiconductor fabrication. The development of high-power …

Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma

J Hernandez-Rueda, B Liu, DJ Hemminga… - Physical Review …, 2022 - APS
We experimentally and numerically investigate the early-time hydrodynamic response of tin
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …

High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model

DJ Hemminga, L Poirier, MM Basko… - Plasma Sources …, 2021 - iopscience.iop.org
We present the results of a joint experimental and theoretical study of plasma expansion
arising from Nd: YAG laser ablation (laser wavelength λ= 1.064 μm) of tin microdroplets in …