Highlights•FeCoNiCrMnMo x films were prepared by direct current magnetron co-
sputtering.•Effect of Mo addition on structure and properties of film was systematically …

Hydrogenated Al-doped diamond-like carbon films were prepared in a hybrid plasma
system combines magnetron sputtering and anode layer ion source, which allows …

Hard and wear resistant coatings are useful to enhance the functional properties and
improve the lifetime of mechanical components. This study proposes a relationship between …

DLC films with weak carbide former Al and carbide former Cr co-doping (Al: Cr-DLC) were
deposited by a hybrid beams system comprising an anode-layer linear ion beam source …

Amorphous carbon films were deposited by means of closed-field unbalanced magnetron
sputtering (CFUBMS). The silicon content was fixed at 1.3 at.%, while the chromium content …

Rotational speed has an important influence on the performance of coating materials. The
aC: Ta composite coatings were prepared by controlling the substrate rotational speed …

In this paper, the structure as well as tribological properties of amorphous carbon (aC) films
modified by titanium doping (aC: Ti) were examined. The aC: Ti films were deposited by …

The influence of film thickness on the microstructure and tribomechanical characteristics of
titanium nitride (TiN) thin films deposited using reactive DC magnetron sputtering technique …

The fracture toughness of multilayer diamond like carbon (DLC) coated silicon
microstructures was characterized using the pillar splitting method in this study. Two types of …

Four types of W-doped graphite-like carbon (W-GLC) films were deposited under different W
target currents by magnetron sputtering method. The effects of W content on the …