CMOS-integrated aluminum nitride MEMS: A review
RMR Pinto, V Gund, RA Dias… - Journal of …, 2022 - ieeexplore.ieee.org
Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
CMOS MEMS thermal flow sensor with enhanced sensitivity for heating, ventilation, and air conditioning application
In this article, by using 0.35-μm two-polysilicon four-metal CMOS MEMS technology, a
thermoresistive micro calorimetric flow (TMCF) sensor with two packaging designs is …
thermoresistive micro calorimetric flow (TMCF) sensor with two packaging designs is …
A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With 6 m/s Linear Range
This article presents a complementary metal-oxide semiconductor (CMOS)-
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …
Bidirectional CMOS-MEMS airflow sensor with sub-mW power consumption and high sensitivity
This article presents a bidirectional thermoresistive micro calorimetric flow (TMCF) sensor
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …
A review and analysis of current-mode biosensing front-end ICs for nanopore-based DNA sequencing
Bio-sensors connect the biological world with electronic devices, widely used in biomedical
applications. The combination of microelectronic and medical technologies makes …
applications. The combination of microelectronic and medical technologies makes …
Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors
M Li, G Qin, C Jia, D Zhang, Z Li, X Han, S Xu… - Microsystems & …, 2024 - nature.com
With the rapid development of various fields, including aerospace, industrial measurement
and control, and medical monitoring, the need to quantify flow velocity measurements is …
and control, and medical monitoring, the need to quantify flow velocity measurements is …
High sensitivity and wide dynamic range thermoresistive micro calorimetric flow sensor with CMOS MEMS technology
In this paper, a thin film based Thermoresistive Micro Calorimetric Flow (TMCF) sensor by
using a 0.35 μm 2P4M CMOS MEMS technology is designed, fabricated and tested. The …
using a 0.35 μm 2P4M CMOS MEMS technology is designed, fabricated and tested. The …
A wafer-level packaged CMOS MEMS Pirani vacuum gauge
In this article, we report a wafer-level packaged Pirani vacuum gauge using the proprietary
InvenSense CMOS MEMS technology. The micro Pirani vacuum gauge features three …
InvenSense CMOS MEMS technology. The micro Pirani vacuum gauge features three …
A smart dual-mode calorimetric flow sensor
V Kitsos, A Demosthenous, X Liu - IEEE Sensors Journal, 2019 - ieeexplore.ieee.org
A smart thermal flow sensor system is presented. It makes use of a novel heater control
circuit, which can automatically set the operating mode to either constant power or constant …
circuit, which can automatically set the operating mode to either constant power or constant …
A characterization of the performance of gas sensor based on heater in different gas flow rate environments
The performance of gas sensors based on micro-heater is highly dependent on the
environment temperature, heater temperature, and gas flow rate. The performance …
environment temperature, heater temperature, and gas flow rate. The performance …