Aluminum nitride (AlN) thin films are widely investigated due to their unique physical
properties and applications in energy harvesting devices, ultrasonic transducers …

Several key sputtering parameters for the deposition of ScxAl1− xN such as target design,
sputtering atmosphere, sputtering power, and substrate temperature are reviewed in detail …

In this paper, the use of a structure comprising a thin LiNbO 3 plate and a multilayered
acoustic mirror composed of SiO 2 and Pt for high-performance longitudinal leaky surface …

Phonons at gigahertz frequencies interact with electrons, photons, and atomic systems in
solids, and therefore, have extensive applications in signal processing, sensing, and …

Surface acoustic wave (SAW) devices are widely used for physical, chemical, and biological
sensing applications, and their sensing mechanisms are generally based on frequency …

We use femtosecond extreme ultraviolet pulses derived from a free electron laser to excite
and probe surface acoustic waves (SAWs) on the (001) surface of single crystal SrTiO 3 …

Wireless and passive surface acoustic wave (SAW) devices with nanoporous metal-organic
framework (MOF) sensing layers are attractive gas sensors for applications in many fields …

One approach to extend the acoustic applications of aluminum nitride (AlN) in the GHz
frequency range is to take advantage of the piezoelectric performance and high acoustic …

We report in this paper on the study of surface acoustic wave (SAW) resonators based on an
AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN …

A layered structure ScAlN/diamond configured with embedded electrodes is studied for high
frequency and wide band SAW devices. Theoretical studies are performed to calculate the …