New approaches to nanofabrication: molding, printing, and other techniques

BD Gates, Q Xu, M Stewart, D Ryan, CG Willson… - Chemical …, 2005 - ACS Publications
“Nanofabrication” is the process of making functional structures with arbitrary patterns
having minimum dimensions currently defined (more-or-less arbitrarily) to be e100 nm …

Unconventional nanofabrication

BD Gates, Q Xu, JC Love, DB Wolfe… - Annu. Rev. Mater …, 2004 - annualreviews.org
▪ Abstract Nanostructures are fabricated using either conventional or unconventional tools—
that is, by techniques that are highly developed and widely used or by techniques that are …

Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air

J Bonse, H Sturm, D Schmidt, W Kautek - Applied Physics A, 2000 - Springer
Ultrashort-pulse laser ablation (τ= 130 fs, λ= 800 nm, repetition rate 2–20 Hz) of titanium
nitride was investigated for laser fluences between 0.3 and 4.5 J/cm 2 using the direct …

Optimized titanium nitride epitaxial film for refractory plasmonics and solar energy harvesting

R Mishra, CW Chang, A Dubey, ZY Chiao… - The Journal of …, 2021 - ACS Publications
Titanium nitride (TiN) is an emerging material for refractory plasmonics owing to its excellent
optical properties in the visible and near-infrared regions, high melting temperature, extreme …

Nanomachining of (110)-oriented silicon by scanning probe lithography and anisotropic wet etching

FSS Chien, CL Wu, YC Chou, TT Chen, S Gwo… - Applied physics …, 1999 - pubs.aip.org
We have demonstrated that silicon nanostructures with high aspect ratios, having∼ 400 nm
structural height and∼ 55 nm lateral dimension, may be fabricated by scanning probe …

Fast Solution-Combustion Synthesis of Nitrogen-Modified Li4Ti5O12 Nanomaterials with Improved Electrochemical Performance

X Li, H Lin, W Cui, Q Xiao, J Zhao - ACS applied materials & …, 2014 - ACS Publications
A series of nitrogen-modified Li4Ti5O12 (N-LTO) nanomaterials with hierarchical
micro/nanoporous structures are first synthesized via a facile one-step combustion process …

Configurable nanoscale crossbar electronic circuits made by electrochemical reaction

Y Chen, RS Williams - US Patent 6,518,156, 2003 - Google Patents
The present application is a continuation-in-part of appli cation Ser. No. 09/280,225, entitled
“Molecular Wire Cross bar Interconnect (MWCI) for Signal Routing and Communications' …

Enhancing microwave absorption by constructing core/shell TiN@ TiO2 heterostructures through post-oxidation annealing

S Liu, X Meng, Z Wang, Z Li, K Yang - Materials Letters, 2019 - Elsevier
The microwave absorption of the dieletric loss materials could be regulated by compositing
other compositions and constructing special structures. Herein, TiN@ TiO 2 nanocomposites …

Nanometer-scale conversion of Si3N4 to SiOx

FSS Chien, JW Chang, SW Lin, YC Chou… - Applied Physics …, 2000 - pubs.aip.org
It has been found that atomic force microscope AFM induced local oxidation is an effective
way for converting thin (5 nm) Si3N4 films to SiOx. The threshold voltage for the 4.2 nm film …

Nanofabrication with atomic force microscopy

Q Tang, SQ Shi, L Zhou - Journal of Nanoscience and …, 2004 - ingentaconnect.com
Atomic force microscopy (AFM) was developed in 1986. It is an important and versatile
surface technique, and is used in many research fields. In this review, we have summarized …