Intelligent motion control is integral to modern cyber-physical systems. However, smart
integration of intelligent motion control with commercial and industrial systems requires …

Industrial applications and processes such as quality inspections, pick and place operations,
and semiconductor manufacturing require accurate positioning control for achieving the high …

With the growing demand for semiconductor products, the semiconductor manufacturing
industries are trying to increase their production capacities. Additional requirements and …

Industrial motion control systems, e. pick-andplace tasks in semiconductor manufacturing
equipment, require precise positioning for achiering high machine throughput. Linear …

Accurate object positioning is critical in many industrial manufacturing applications. The
execution time and precision of the object positioning task have a significant impact on the …

Accurate pattern transfer, coupled with stringent requirements for throughput and quality in
lithography systems, necessitates the wafer scanner executing an aggressive motion with …

The high-speed, high-precision positioning of objects is a critical component in various
industrial manufacturing processes. The semiconductor die packaging, for instance, requires …

The high-precision and high-speed positioning systems require position feedback with high
accuracy at a higher frequency. As reported in recent literature, high accuracy and high …

In modern semiconductor manufacturing, motion control systems are often used to move
semiconductors from wafers to the following assembly stages. Usually, a conveyor belt …

With the ever-increasing demand for semiconductors, requirements for faster and more
accurate semiconductor manufacturing tools and assembly platforms grows as well. The …