Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

This is the second of a three-part series on micro-electromechanical systems (MEMS)
sensor technology. In the first part, a general introduction to MEMS sensing was given …

Low-power electronic applications are normally powered by batteries, which have to deal
with stringent lifetime and size constraints. To enhance operational autonomy, energy …

In this paper, we develop closed expressions for the equivalent bending and shear stiffness
of beams with regular square perforations, and apply them to the problem of determining the …

Although lots of efforts have been made to produce the optimal piezoelectric MEMS vibration
energy harvesters in the past decade, the state-of-the-art study is still dependent on the …

Abstract System development and characterization of a low noise low offset SOI MEMS–
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a …

A continuum finite element model for the nanoscale plates considering the surface effect of
the material is developed. Governing equations for Kirchoff and Mindlin nanoplates are …

Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used
in many applications, including biological and gas sensors, magnetic field sensors, RF …

Piezoelectric nanogenerators can convert energy from ambient vibrations into electrical
energy. In the future, these nanogenerators could substitute conventional electrochemical …

Multilayered microresonators commonly use sensitive coating or piezoelectric layers for
detection of mass and gas. Most of these microresonators have a variable cross-section that …