Acceleration sensors: Sensing mechanisms, emerging fabrication strategies, materials, and applications
Accelerometers are among the most mature sensor technologies with a broad range of
applications in multiple fields and industries. They represent the most widely used …
applications in multiple fields and industries. They represent the most widely used …
Bidirectional CMOS-MEMS airflow sensor with sub-mW power consumption and high sensitivity
This article presents a bidirectional thermoresistive micro calorimetric flow (TMCF) sensor
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …
implemented by a 0.18-μ m complementary metal–oxide–semiconductor …
A fast-response breathing monitoring system for human respiration disease detection
This paper presents a sensing system for the real-time monitoring of human respiration. The
system is equipped with a fast response thermoresistive micro calorimetric flow (TMCF) …
system is equipped with a fast response thermoresistive micro calorimetric flow (TMCF) …
An integrated CMOS MEMS gas flow sensor with detection limit towards micrometer per second
We report an integrated Thermoresistive Micro Calorimetric Flow (TMCF) sensor with the
detection limit towards μm/s level by using proprietary InvenSense CMOS MEMS …
detection limit towards μm/s level by using proprietary InvenSense CMOS MEMS …
Integrated predicted mean vote sensing system using MEMS multi-sensors for smart HVAC systems
In this article, we report a predicted mean vote (PMV) index based micro Human Thermal
Comfort Sensing (HTCS) system with multiple MEMS sensors. The system consists of a …
Comfort Sensing (HTCS) system with multiple MEMS sensors. The system consists of a …
A Low-Power and Robust Micromachined Thermal Convective Accelerometer
This paper presents a micromachined thermal convective accelerometer with low power and
high reliability. This accelerometer comprises a heater and two thermistors. The central …
high reliability. This accelerometer comprises a heater and two thermistors. The central …
Theoretical and experimental study and compensation for temperature drifts of micro thermal convective accelerometer
We present an ambient temperature compensation method for micro thermal convective
accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) …
accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) …
Two-dimensional theoretical modeling and experimental investigations of micromachined thermal expansion-based angular motion sensor
A two-dimensional (2D) model was developed, for the first time, to describe the
characteristics of the micromachined thermal expansion-based angular motion (TEAM) …
characteristics of the micromachined thermal expansion-based angular motion (TEAM) …
Fabrication and Characterization of a MEMS Thermal Convective Accelerometer on Silicon-in-Glass Substrate
In this article, the fabrication and characterization of a 2-D micro-electromechanical system
(MEMS) thermal convective accelerometer are demonstrated. This sensor consists of a …
(MEMS) thermal convective accelerometer are demonstrated. This sensor consists of a …
Sensitivity and frequency response improvement of the micro thermal convective accelerometer with structure optimization
We present a theoretical model for transient analysis of the micro thermal convective
accelerometer (MTCA). By leveraging this model, efficient parametric prediction can be …
accelerometer (MTCA). By leveraging this model, efficient parametric prediction can be …