[HTML][HTML] Effective quality factor tuning mechanisms in micromechanical resonators

JML Miller, A Ansari, DB Heinz, Y Chen… - Applied Physics …, 2018 - pubs.aip.org
Quality factor (Q) is an important property of micro-and nano-electromechanical (MEM/NEM)
resonators that underlie timing references, frequency sources, atomic force microscopes …

Tunable micro-and nanomechanical resonators

WM Zhang, KM Hu, ZK Peng, G Meng - Sensors, 2015 - mdpi.com
Advances in micro-and nanofabrication technologies have enabled the development of
novel micro-and nanomechanical resonators which have attracted significant attention due …

Structural optimization for nonlinear dynamic response

S Dou, BS Strachan, SW Shaw… - … Transactions of the …, 2015 - royalsocietypublishing.org
Much is known about the nonlinear resonant response of mechanical systems, but methods
for the systematic design of structures that optimize aspects of these responses have …

[HTML][HTML] Tailoring the nonlinear response of MEMS resonators using shape optimization

LL Li, PM Polunin, S Dou, O Shoshani… - Applied Physics …, 2017 - pubs.aip.org
We demonstrate systematic control of mechanical nonlinearities in micro-electromechanical
(MEMS) resonators using shape optimization methods. This approach generates beams …

A review on in situ stiffness adjustment methods in MEMS

MLC De Laat, HHP Garza, JL Herder… - Journal of …, 2016 - iopscience.iop.org
In situ stiffness adjustment in microelectromechanical systems is used in a variety of
applications such as radio-frequency mechanical filters, energy harvesters, atomic force …

A force-compensated compliant MEMS-amplifier with electrostatic anti-springs

P Schmitt, M Hoffmann - Microsystems & Nanoengineering, 2023 - nature.com
In this paper, an electrostatic compliant mechanical amplifier intended for force-
compensated displacement amplification in MEMS sensor applications is described …

Noise squeezing controlled parametric bifurcation tracking of MIP-coated microbeam MEMS sensor for TNT explosive gas sensing

LL Li, EL Holthoff, LA Shaw… - Journal of …, 2014 - ieeexplore.ieee.org
This paper reports real-time explosive gas sensing (DNT) in atmospheric pressure utilizing
the noise squeezing effect that occurs before a bifurcation event. A noise-squeezing …

Genetic algorithm shape optimization to manipulate the nonlinear response of a clamped-clamped beam

T Mollik, Y Geng, MREU Shougat, T Fitzgerald… - Heliyon, 2022 - cell.com
Dynamical systems, which are described by differential equations, can have an enhanced
response because of their nonlinearity. As one example, the Duffing oscillator can exhibit …

A MEMS implementation of a classic parametric resonator

S Shmulevich, IH Grinberg… - Journal of …, 2015 - ieeexplore.ieee.org
We present a microelectromechanical systems realization of a classic parametric resonator.
This parametric resonator is ideal in the sense that the electrostatic stiffness, which may be …

Challenges in fabrication of high aspect ratio electrostatic comb-drive microactuator using one-step X-ray lithography

R Shukla, HK Kannojia, C Mukherjee… - ISSS Journal of Micro …, 2020 - Springer
Abstract A High Aspect Ratio (HAR) electrostatic comb-drive microactuator of polymethyl-
methacrylate (PMMA) is designed to deliver nearly 40 µm uniaxial displacement at 25 V DC …