AlN piezoelectric thin films for energy harvesting and acoustic devices
Aluminum nitride (AlN) thin films are widely investigated due to their unique physical
properties and applications in energy harvesting devices, ultrasonic transducers …
properties and applications in energy harvesting devices, ultrasonic transducers …
AlScN: A III-V semiconductor based ferroelectric
Ferroelectric switching is unambiguously demonstrated for the first time in a III-V
semiconductor based material: Al 1-x Sc x N—A discovery which could help to satisfy the …
semiconductor based material: Al 1-x Sc x N—A discovery which could help to satisfy the …
Materials for electronically controllable microactuators
MF Reynolds, MZ Miskin - MRS bulletin, 2024 - Springer
Electronically controllable actuators have shrunk to remarkably small dimensions, thanks to
recent advances in materials science. Currently, multiple classes of actuators can operate at …
recent advances in materials science. Currently, multiple classes of actuators can operate at …
Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
The atomic layer deposition (ALD) of AlN from AlCl 3 was investigated using a thermal
process with NH 3 and a plasma-enhanced (PE) ALD process with Ar/NH 3 plasma. The …
process with NH 3 and a plasma-enhanced (PE) ALD process with Ar/NH 3 plasma. The …
Uncooled infrared detector based on an aluminum nitride piezoelectric fishnet metasurface
This article reports on the first demonstration of a high resolution (~ 1.9 nW/Hz 1/2 measured
in 200 Hz bandwidth) and fast (~ 5.3 ms) uncooled Infrared (IR) detector based on a high …
in 200 Hz bandwidth) and fast (~ 5.3 ms) uncooled Infrared (IR) detector based on a high …
Regulating the electrical conductivity of hexagonal boron nitride nanosheets with excellent tribological performance for micro and nano electromechanical system …
The outstanding electrical insulativity greatly restricts the applications of hexagonal boron
nitride nanosheets (h-BNNSs) in semiconductive or conductive micro and nano …
nitride nanosheets (h-BNNSs) in semiconductive or conductive micro and nano …
Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
KM Howell, W Bashir, A De Pastina… - Journal of Vacuum …, 2019 - pubs.aip.org
Ultrathin aluminum nitride (AlN) films are of great interest for integration into
nanoelectromechanical systems for actuation and sensing. Given the direct relationship …
nanoelectromechanical systems for actuation and sensing. Given the direct relationship …
Terahertz acoustic wave on piezoelectric semiconductor film via large-scale molecular dynamics simulation
R Hikata, K Tsuruta, A Ishikawa… - Japanese Journal of …, 2015 - iopscience.iop.org
By atomistic simulation, we investigate an acoustic wave at THz frequencies in nanoscale
thin films of aluminum–nitride piezoelectric material. A mode analysis reveals that the …
thin films of aluminum–nitride piezoelectric material. A mode analysis reveals that the …
Design and simulation of piezoelectric MEMS logic gates
In this article, MEMS-based logic gates such as OR, AND, NOT, NOR, and NAND gates with
functionalities similar to the electronic digital devices are designed and simulated. The key …
functionalities similar to the electronic digital devices are designed and simulated. The key …
High resolution calorimetric sensing based on Aluminum Nitride MEMS resonant thermal detectors
This paper presents a high temperature resolution (994.5 μK/Hz 1/2 in a 50 Hz
measurement bandwidth) micro-calorimetric sensor based on a high frequency (134.5 MHz) …
measurement bandwidth) micro-calorimetric sensor based on a high frequency (134.5 MHz) …