S Kurtz, R Reedy, B Keyes, GD Barber,
JF Geisz… - Journal of crystal …, 2002 - Elsevier
Two nitrogen precursors (NF3 and u-dimethylhydrazine) and two gallium precursors
(trimethylgallium and triethylgallium) are explored for the growth of GaAs1− xNx by metal …