Fine Pitch Aluminum Hybrid Bonding: Overcoming the Challenges in Plating, Passivation and Bonding

I Cirulis, DS Kalangi, V Dubey, M Franz… - 2024 IEEE 10th …, 2024 - ieeexplore.ieee.org
Aluminium to Aluminium (Al-Al) direct bonding is CMOS line compatible and is comparable
to gold (Au) and copper (Cu) due to metal cross-contamination in a process line. The Au-Au …

Aluminum-Aluminum Wafer Level Thermo Compression Bonding Using Thick Electroplated Aluminum Bonding Frames

S Braun, I Cirulis, K Vogel, C Hofmann… - 2024 IEEE 10th …, 2024 - ieeexplore.ieee.org
Wafer bonding is crucial in semiconductor manufacturing, integrating diverse materials and
creating complex devices. Aluminum thermo-compression bonding (Al TCB) is promising for …