Synthesis, Characterization, and Single-Crystal X-ray Structures of Refractory Metal Compounds as Precursors for the Single-Source Chemical Vapor Deposition of …
The chemical vapor deposition of refractory metal nitrides requires volatile precursors and
has previously been achieved by using metal complexes containing a variety of imide …
has previously been achieved by using metal complexes containing a variety of imide …
Put a Ring on It: Improving the Thermal Stability of Molybdenum Imides through Ligand Rigidification
MA Land, KG Lawford, LK Watanabe, M Atherton… - …, 2024 - ACS Publications
Volatile bis (tert-butylimido)-dichloromolybdenum (VI) compounds containing N, N'-chelating
ligands,(tBuN) 2MoCl2· L, have previously been used as single-source precursors for the …
ligands,(tBuN) 2MoCl2· L, have previously been used as single-source precursors for the …
Designing Volatile Molybdenum Compounds for Vapour-Phase Deposition
MA Land - 2023 - repository.library.carleton.ca
The vapor phase deposition of many molybdenum-containing films relies on the delivery of
volatile compounds with the general bis (tert-butylimido) molybdenum (VI) framework …
volatile compounds with the general bis (tert-butylimido) molybdenum (VI) framework …